Wafer–to–wafer transfer process of barium strontium titanate for frequency tuning applications using laser pre-irradiation-Reference-Cited by-同舟云学术

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Wafer–to–wafer transfer process of barium strontium titanate for frequency tuning applications using laser pre-irradiation

Published:2015-02-12 Issue:3 Volume:25 Page:035015
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Samoto Tetuo,Hirano Hideki,Somekawa Toshihiro,Hikichi Kousuke,Fujita Masayuki,Esashi Masayoshi,Tanaka Shuji

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/25/i=3/a=035015/pdf

Reference36 articles.

1. Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate

2. Impact of thermal strain on the dielectric constant of sputtered barium strontium titanate thin films

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Highly transparent piezoelectric PZT membranes for transducer applications;Sensors and Actuators A: Physical;2022-10

2. Heterogenous integration technology using wafer-to-wafer transfer;2015 IEEE International Ultrasonics Symposium (IUS);2015-10

3. Moving Tunable Filters Forward: A \"Heterointegration\" Research Project for Tunable Filters Combining MEMS and RF SAW\/BAW Technologies;IEEE Microwave Magazine;2015-08

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