Hard yet tough CrN/Si3N4 multilayer coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering-Reference-Cited by-同舟云学术

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Hard yet tough CrN/Si3N4 multilayer coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering

Published:2020-02 Issue: Volume:502 Page:144168
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Ou Y.X.,Ouyang X.P.,Liao B.,Zhang X.,Zhang S.

Funder

Guangdong Province Key Area Research and Development Program

Fundamental Research Funds

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference39 articles.

1. New routes in the preparation of mechanically hard films;Sproul;Science,1996

2. Toughness evaluation of hard coatings and thin films;Zhang;Thin Solid Films,2012

3. Hard yet tough nanocomposite coatings present status and future trends;Zhang;Plasma Process. Polym.,2007

4. Flexible hard nanocomposite coatings;Musil;RSC Adv.,2015

5. Recent advances in modulated pulsed power magnetron sputtering for surface engineering;Lin;JOM,2011

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