Sputtering and nitridation of transition metal surfaces under low energy, steady state nitrogen ion bombardment-Reference-Cited by-同舟云学术

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Sputtering and nitridation of transition metal surfaces under low energy, steady state nitrogen ion bombardment

Published:2020-03 Issue: Volume:505 Page:144529
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Phadke Parikshit^ORCID,Sturm Jacobus M.,van de Kruijs Robbert W.E.,Bijkerk Fred

Funder

TNO,

Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek

Industrial Focus Group XUV Optics at the MESA+ Institute for Nanotechnology at the University of Twente

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference47 articles.

1. Magnetospheric ion bombardment profiles of satellites: Europa and Dione;Pospieszalska;Icarus,1989

2. Ion-source and low-energy beam-transport issues with the front-end systems for the spallation neutron source;Keller;Rev. Sci. Instrum.,2002

3. Interaction between seeding gas ions and nitrogen saturated tungsten surfaces;Dobes;Int. J. Mass Spectrom.,2014

4. A particle-in-cell plus Monte Carlo study of plasma-induced damage of normal incidence collector optics used in extreme ultraviolet lithography;Wieggers;J. Appl. Phys.,2008

5. Particle-in-cell Monte Carlo simulations of an extreme ultraviolet radiation driven plasma;Van Der Velden;Phys. Rev. E - Stat., Nonlinear, Soft Matter Phys.,2006

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