Particle-in-cell Monte Carlo simulations of an extreme ultraviolet radiation driven plasma-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Particle-in-cell Monte Carlo simulations of an extreme ultraviolet radiation driven plasma

Published:2006-03-14 Issue:3 Volume:73 Page:
ISSN:1539-3755
Container-title:Physical Review E
language:en
Short-container-title:Phys. Rev. E

Author:

van der Velden M. H. L.,Brok W. J. M.,van der Mullen J. J. A. M.,Goedheer W. J.,Banine V.

Publisher

American Physical Society (APS)

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Strategy and Management,Mechanical Engineering

Link

http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevE.73.036406/fulltext

Reference18 articles.

1. Pushing the limits of lithography

2. Time-resolved pinhole camera imaging and extreme ultraviolet spectrometry on a hollow cathode discharge in xenon

3. Pinch-plasma radiation source for extreme-ultraviolet lithography with a kilohertz repetition frequency

4. Plasma Physics via Computer Simulation

5. Computer Simulation Using Particles

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Particle-in-cell simulations of EUV-induced hydrogen plasma in the vicinity of a reflective mirror;Plasma Science and Technology;2024-08-01

2. A global plasma and surface model of hydrogen/methane inductively coupled discharge to analyze hydrocarbon plasma–surface interactions in extreme-ultraviolet lithography machines;Journal of Applied Physics;2024-07-22

3. Research on efficient and stable control of EUV-induced hydrogen plasma;Journal of Applied Physics;2022-06-21

4. Low-Energy Plasma Source for Clean Vacuum Environments: EUV Lithography and Optical Mirrors Cleaning;IEEE Transactions on Plasma Science;2021-10

5. EUV-induced hydrogen plasma: pulsed mode operation and confinement in scanner;Journal of Micro/Nanopatterning, Materials, and Metrology;2021-08-16

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3