Enhanced c-axis orientation of aluminum nitride thin films by plasma-based pre-conditioning of sapphire substrates for SAW applications-Reference-Cited by-同舟云学术

Enhanced c-axis orientation of aluminum nitride thin films by plasma-based pre-conditioning of sapphire substrates for SAW applications

Published:2018-03 Issue: Volume:435 Page:432-437
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Gillinger M.,Shaposhnikov K.,Knobloch T.,Stöger-Pollach M.,Artner W.,Hradil K.,Schneider M.,Kaltenbacher M.,Schmid U.

Funder

BMVIT

BMWFJ

the federal provinces of Carinthia and Styria

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

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