Ion beam nanoscale fabrication and lithography—A review

Author:

Baglin J.E.E.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference37 articles.

1. Lithography of high spatial density biosensor structures with sub-100nm spacing by MeV proton beam writing with minimal proximity effect;Whitlow;Nanotechnology,2004

2. J.F. Ziegler, Stopping and Range of Ions in Matter – SRIM, Monte Carlo simulation software, 2003 ed., www.srim.org or contact Ziegler@SRIM.org.

3. Stochastic spatial energy deposition profiles for MeV protons and keV electrons;Udalagama;Phys. Rev. B,2009

4. CASINO V2.42 – a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users;Drouin;Scanning,2007

5. ITRS: 2007 Lithography Update, Lithography iTWG, December 2007, p. 11, www.itrs.net/links/2007_Winter_Presentations/09_Litho_2007_JP.pdf.

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