The effect of applied dc bias voltage on the properties of a-C:H films prepared in a dual dc–rf plasma system-Reference-Cited by-同舟云学术

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The effect of applied dc bias voltage on the properties of a-C:H films prepared in a dual dc–rf plasma system

Published:2004-04 Issue:1-4 Volume:227 Page:364-372
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Li H.X,Xu T,Chen J.M,Zhou H.D,Liu H.W

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference36 articles.

1. Diamond-like amorphous carbon

2. Properties and prospects for non-crystalline carbons

3. Diamond-like carbon: state of the art

4. Characteristics of a direct negative carbon ion beam source and AFM observations of DLC film

5. Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering

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