Author:
Fug Frank,Petry Adrien,Jost Hendrik,Ahmed Aisha,Zamanzade Mohammad,Possart Wulff
Funder
German DFG
National Research Fund, Luxembourg
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference51 articles.
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4. Chemical vapour deposition of coatings
5. Atomic Layer Deposition: An Overview
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