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Effect of sputtering oxygen partial pressures on structure and physical properties of high resistivity ZnO films

  • Published:2004-02 Issue:4 Volume:223 Page:318-329
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Chen J.J,Gao Y,Zeng F,Li D.M,Pan F

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

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3. Fundamentals of Monitoring Condensation and Frost/Ice Formation in Cold Environments Using Thin-Film Surface-Acoustic-Wave Technology;ACS Applied Materials & Interfaces;2023-07-11

4. Formation of ZnO films on SiC/porous Si/Si substrates;Semiconductor Physics, Quantum Electronics and Optoelectronics;2023-06-26

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