Microfabrication in free-standing gallium nitride using UV laser micromachining-Reference-Cited by-同舟云学术

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Microfabrication in free-standing gallium nitride using UV laser micromachining

Published:2006-04 Issue:13 Volume:252 Page:4897-4901
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Gu E.,Howard H.,Conneely A.,O’Connor G.M.,Illy E.K.,Knowles M.R.H.,Edwards P.R.,Martin R.W.,Watson I.M.,Dawson M.D.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference6 articles.

1. Optical spectroscopy of GaN microcavities with thicknesses controlled using a plasma etchback

2. 250nmAlGaN light-emitting diodes

3. Nitride deep-ultraviolet light-emitting diodes with microlens array

4. Proceedings of the SPIE, Photonics Fabrication Europe;Illy,2002

5. Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser

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1. Recent progress of laser processing technology in micro-LED display manufacturing: A review;Optics & Laser Technology;2025-02

2. Metal Stop Laser Drilling for Blind via Holes of GaN‐on‐GaN Devices;physica status solidi (a);2023-04-04

3. Modeling and optimizing femtosecond laser process parameters for high-efficient and near damage-free micromachining of single-crystal GaN substrate;Materials Science in Semiconductor Processing;2023-01

4. Single and multi-pulse 266nm nanosecond solid-state laser ablation of SiC;Advanced Laser Processing and Manufacturing IV;2020-10-10

5. On the formation of cleaved mirror facets of GaN-based laser diodes—A comparative study of diamond-tip edge-scribing and laser scribing;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-07

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