On the formation of cleaved mirror facets of GaN-based laser diodes—A comparative study of diamond-tip edge-scribing and laser scribing-Reference-Cited by-同舟云学术

On the formation of cleaved mirror facets of GaN-based laser diodes—A comparative study of diamond-tip edge-scribing and laser scribing

Published:2016-07 Issue:4 Volume:34 Page:041222
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Kang Ji Hye,Krüger Olaf,Spengler Uwe,Zeimer Ute,Einfeldt Sven,Kneissl Michael

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4953885

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1. Smooth and Vertical Sidewall Formation for AlGaN-Based Electronic and Optoelectronic Devices;ECS Journal of Solid State Science and Technology;2024-08-01

2. Exploring the potential of the fabrication of large-size mirror facet for semiconductor laser bar utilizing mechanical cleavage;Ceramics International;2023-07

3. Molecular dynamics study on mechanical cleavage mechanisms of GaAs and experimental verification;Ceramics International;2022-12

4. Reduction of the lasing threshold in optically pumped AlGaN/GaN lasers with two-step etched facets;Semiconductor Science and Technology;2022-06-01

5. Influence of the hydrogen level in (InAlGa)N-based laser diodes on the stability of the device’s operating voltage;Journal of Physics D: Applied Physics;2021-01-23