Removal of oxides from copper surface using femtosecond and nanosecond pulsed lasers-Reference-Cited by-同舟云学术

Removal of oxides from copper surface using femtosecond and nanosecond pulsed lasers

Published:2015-09 Issue: Volume:349 Page:361-367
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Seo Changho,Ahn Daehwan,Kim Dongsik

Funder

NRF

Ministry of Trade, Industry and Energy

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference20 articles.

1. Multilevel interconnections for ULSI and GSI era;Murarka;Mater. Sci Eng.,1997

2. http://www-03.ibm.com/ibm/history/ibm100/us/en/icons/copperchip/.

3. Yield enhancement report and table from International Technology Roadmap for Semiconductors (ITRS), 2012 edition, http://www.itrs.net/Links/2012ITRS/Home2012.htm.

4. Solderability assessment via sequential electrochemical reduction anlaysis;Morgan Tench;J. Appl. Electrochem.,1994

5. The removal of copper oxides by ethyl alcohol monitored in situ by spectroscopic ellipsometry;Satta;J. Electrochem. Soc.,2003

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A review of thermal effects and substrate damage control in laser cleaning;Optics & Laser Technology;2024-07

2. Influence of surface condition of copper sheets on ultrasonic metal welding;Journal of Advanced Joining Processes;2024-06

3. Characterization of laser-induced surface structures of aluminum in an oxygen-free atmosphere;Procedia CIRP;2024

4. Real-time control of laser materials processing using deep learning;Manufacturing Letters;2023-11

5. An adaptive laser processing method of multilayer heterogeneous materials by monitoring dynamic spectrum at kHz-MHz level;Optics and Lasers in Engineering;2023-11