Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition-Reference-Cited by-同舟云学术

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Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition

Published:2011-02 Issue:8 Volume:257 Page:3446-3450
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Chen Yu-Yun,Hsu Jin-Cherng,Wang Paul W.,Pai Yao-Wei,Wu Chih-Yuan,Lin Yung-Hsin

Funder

Science and Engineering College of Fu-Jen Catholic University

Sapintia Culture and Education Foundation

National Science Council of Taiwan

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference18 articles.

1. Improved properties of Al-doped ZnO film by electron beam evaporation technique

2. Preparation of aluminum doped zinc oxide films and the study of their microstructure, electrical and optical properties

3. High conductivity and transparent ZnO:Al films prepared at low temperature by DC and MF magnetron sputtering

4. Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method

5. Effect of thickness on structural, electrical, and optical properties of ZnO: Al films deposited by pulsed laser deposition

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