High conductivity and transparent ZnO:Al films prepared at low temperature by DC and MF magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Studies on aluminum-doped ZnO films for transparent electrode and antireflection coating of β-FeSi2 optoelectronic devices
2. Thin-film solar cells: an overview
3. Low resisitivity transparent electrodes for displays on polymer substrates
4. Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: Relationships between plasma parameters and structural and electrical film properties
5. Optimization of the electrical properties of magnetron sputtered aluminum-doped zinc oxide films for opto-electronic applications
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