Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering-Reference-Cited by-同舟云学术

Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering

Published:2006-12 Issue:5 Volume:253 Page:2739-2746
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Sreemany Monjoy,Sen Suchitra

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference27 articles.

1. Pt-base electrodes and effects on phase formations and electrical properties of high-dielectric thin films

2. Effect of in situ Pt bottom electrode deposition and of Pt top electrode preparation on PZT thin films properties

3. Improved fatigue properties of lead zirconate titanate films made on oxygen-implanted platinum electrodes

4. Effects of adhesion layer (Ti or Zr) and Pt deposition temperature on the properties of PZT thin films deposited by RF magnetron sputtering

5. Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy;Briggs,1983

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