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Activation characterization of the Ti-Zr-V getter films deposited by magnetron sputtering

  • Published:2020-10 Issue: Volume:528 Page:147059
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Wang Sihui,Wang Zhiwei,Shu Xin,Wei Wei,Gao Yonghao,Wang Yong

Funder

Fundamental Research Funds for the Central Universities

Ministry of Science and Technology of the People's Republic of China

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference35 articles.

1. NEG thin films for under controlled atmosphere MEMS packaging;Tenchine;Sens. Actuators A,2011

2. The newest getter technologies: materials, processes, equipment;Chuntonov;J. Mater. Sci. Chem. Eng.,2015

3. Nonevaporable getter films for ultrahigh vacuum applications;Benvenuti;J. Vac. Sci. Technol. A,1998

4. Vacuum properties of TiZrV non-evaporable getter films;Benvenuti;Vacuum,2001

5. X-ray photoelectron spectroscopy and static secondary ion mass spectroscopy study of activation mechanism of Zr–V low activation temperature nonevaporable getter films;Mas̆ek;J. Vac. Sci. Technol. A,2003

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