X-ray photoelectron spectroscopy and static secondary ion mass spectroscopy study of activation mechanism of Zr–V low activation temperature nonevaporable getter films-Reference-Cited by-同舟云学术

X-ray photoelectron spectroscopy and static secondary ion mass spectroscopy study of activation mechanism of Zr–V low activation temperature nonevaporable getter films

Published:2003-05 Issue:3 Volume:21 Page:797-805
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Mas̆ek Karel,S̆utara Frantis̆ek,Skála Tomás̆,Drbohlav Jir̆ı́,Veltruská Kater̆ina,Matolı́n Vladimı́r

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1562175

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