Reaction of BCl3 with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry-Reference-Cited by-同舟云学术

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Reaction of BCl3 with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry

Published:2020-12 Issue: Volume:533 Page:146907
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Silva-Quinones Dhamelyz,He Chuan,Butera Robert E.,Wang George T.,Teplyakov Andrew V.

Funder

National Institute of General Medical Sciences

U.S. Department of Energy

National Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference55 articles.

1. Semiconductor surface functionalization for advances in electronics, energy conversion, and dynamic systems;Teplyakov;J. Vac. Sci. Technol. A,2013

2. Chemical manipulation of multifunctional hydrocarbons on silicon surfaces;Leftwich;Surf. Sci. Rep.,2008

3. Covalent surface modification of oxide surfaces;Pujari;Angew. Chemie - Int. Ed.,2014

4. Reactivity of selectively terminated single crystal silicon surfaces;Perrine;Chem. Soc. Rev.,2010

5. Doping of semiconductors by molecular monolayers: monolayer formation, dopant diffusion and applications;Ye;Mater. Sci. Semicond. Process.,2017

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