Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask-Reference-Cited by-同舟云学术

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Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask

Published:2016-11 Issue: Volume:385 Page:145-152
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Virganavičius D.,Cadarso V.J.,Kirchner R.,Stankevičius L.,Tamulevičius T.,Tamulevičius S.,Schift H.

Funder

Scientific Exchange Programme SCIEX-NMS

Swiss National Science Foundation (SNF) Ambizione project

NFFA

H2020 European Research and Innovation Programme

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference30 articles.

1. Diamond nanoimprint technology;Taniguchi;Nanotechnology,2002

2. Diamond planar refractive lenses for third- and fourth-generation X-ray sources;Nöhammer;J. Synchrotron. Radiat.,2003

3. High aspect ratio optical gratings in diamond;Forsberg;Diam. Relat. Mater.,2013

4. Diamond-like amorphous carbon;Robertson;Mater. Sci. Eng. R Reports,2002

5. Diamond-like carbon: state of the art;Grill;Diam. Relat. Mater.,1999

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