Surface composition and micromasking effect during the etching of amorphous Ge-Sb-Se thin films in SF6 and SF6/Ar plasmas-Reference-Cited by-同舟云学术

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Surface composition and micromasking effect during the etching of amorphous Ge-Sb-Se thin films in SF6 and SF6/Ar plasmas

Published:2021-05 Issue: Volume:549 Page:149192
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Meyer T.,Girard A.,Le Dain G.,Rhallabi A.,Baudet E.,Nazabal V.,Němec P.,Cardinaud C.

Funder

Grantová Agentura České Republiky

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference52 articles.

1. Chalcogenide Glasses: Preparation, Properties and Applications;Adam,2014

2. Long, low loss etched As_2S_3 chalcogenide waveguides for all-optical signal regeneration

3. Sputtering and Pulsed Laser Deposition for Near- and Mid-Infrared Applications: A Comparative Study of Ge25Sb10S65 and Ge25Sb10Se65 Amorphous Thin Films

4. Evanescent wave optical micro-sensor based on chalcogenide glass

5. Fabrication of low loss Ge33As12Se55 (AMTIR-1) planar waveguides

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4. One step reactive ion etching of black germanium conical nanostructures: Ultra-wide solar spectral absorption, finite element simulation, super hydrophilicity, photothermal conversion;Solar Energy Materials and Solar Cells;2022-12

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