Effect of substrate tilt on sputter-deposited AuTa films-Reference-Cited by-同舟云学术

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Effect of substrate tilt on sputter-deposited AuTa films

Published:2021-05 Issue: Volume:547 Page:149010
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Engwall A.M.,Bayu Aji L.B.,Baker A.A.,Shin S.J.,Bae J.H.,McCall S.K.,Moody J.D.,Kucheyev S.O.

Funder

US Department of Energy

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference37 articles.

1. The potential of imposed magnetic fields for enhancing ignition probability and fusion energy yield in indirect-drive inertial confinement fusion;Perkins;Phys. Plasmas,2017

2. Synthesis and characterization of Au–Ta nanocomposites for nanomechanical cantilever devices;Nelson-Fitzpatrick;Nanotechnology,2007

3. Volume magnetic susceptibility design and hardness of Au-Ta alloys and Au-Nb alloys for MRI-compatible biomedical applications;Inui;Biomed. Phys. Eng. Express,2017

4. Sputtered Au-Ta films with tunable electrical resistivity;Bayu Aji;J. Phys. D: Appl. Phys.,2021

5. Transient magnetic field diffusion considerations relevant to magnetically-assisted indirect drive Inertial Confinement Fusion;Moody;Phys. Plasmas,2020

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of growth rate and dynamic substrate tilt on properties of Au-Ta alloy films deposited by high-power impulse magnetron sputtering;Surface and Coatings Technology;2024-10

2. Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power impulse magnetron sputtering: Target erosion effects;Journal of Applied Physics;2024-01-17

3. Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS;Surface and Coatings Technology;2023-09

4. A Comparative Study of Pt/Al_0.72Sc_0.28N/Pt-Based Thin-Film Metal-Ferroelectric-Metal Capacitors on GaN and Si Substrates;ACS Applied Materials & Interfaces;2023-08-23

5. Performance scaling with an applied magnetic field in indirect-drive inertial confinement fusion implosions;Physics of Plasmas;2023-07-01

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