1. Synthesis and Real Structure, Institute for Material Science, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany
2. Nanoelectronics, Institute of Electrical Engineering and Information Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany
3. Fraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstraße 1, 25524 Itzehoe, Germany
4. Kiel Nano, Surface and Interface Science (KiNSIS), Kiel University, Christian-Albrechts-Platz 4, D-24118 Kiel, Germany
5. Microsystems and Technology Transfer, Institute for Material Science, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany