Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering-Reference-Cited by-同舟云学术

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Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering

Published:2013-10 Issue: Volume:282 Page:789-797
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Tsai Du-Cheng,Chang Zue-Chin,Kuo Bing-Hau,Shiao Ming-Hua,Chang Shou-Yi,Shieu Fuh-Sheng

Funder

National Science Council of Taiwan

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference38 articles.

1. Handbook of Refractory Carbides and Nitrides;Pierson,1996

2. Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering

3. Mechanical properties and microstructural evolution of TiN coatings alloyed with Al and Si

4. Mechanical and tribological properties of nanocomposite TiSiN coatings

5. Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti–Si–N thin films using magnetron reactive co-sputtering

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