Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti–Si–N thin films using magnetron reactive co-sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference17 articles.
1. Improving the anticorrosion and mechanical behaviour of PACVD TiN
2. Characterization of nano-structured TiN thin films prepared by R.F. magnetron sputtering
3. Oxidation resistance of (Ti,Al,Zr,Si)N coatings in air
4. Different approaches to superhard coatings and nanocomposites
5. Ti-Si-N Films with a High Content of Si
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