Quality assessment of GaN epitaxial films: Acidification scenarios based on XPS-and-DFT combined study

Author:

Zatsepin D.A.,Boukhvalov D.W.,Zatsepin A.F.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference41 articles.

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4. 1200-V Normally off GaN-on-Si field-effect transistors with low dynamic on-resistance;Chu;IEEE Electron Device Lett.,2011

5. Trench formation and corner rounding in vertical GaN power devices;Zhang;Appl. Phys. Lett.,2017

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