Diamond-like carbon films deposited by a hybrid ECRCVD system
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference37 articles.
1. Diamond-like carbon: state of the art
2. Diamond-like carbon — present status
3. Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane
4. A combined MW/ECR-PACVD apparatus for the deposition of diamond and other hard coatings
5. Effect of pressure on the deposition of hydrogenated amorphous carbon films using the electron cyclotron resonance chemical vapor deposition
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2. Optical and Electrical Properties of Diamond-Like Carbon Thin Film with Deposition by ECR-CVD System;Key Engineering Materials;2019-07
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4. Investigation on Surface and Biological Properties of Silver Containing Diamond Like Carbon Films on Polyethylene Terephthalate Film Surface by Hybrid Reactive Sputtering Method;Key Engineering Materials;2012-08
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