Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process-Reference-Cited by-同舟云学术

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Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process

Published:2020-05 Issue:3 Volume:38 Page:033410
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Kulczyk-Malecka Justyna¹^ORCID,Donaghy David²,Delfour-Peyrethon Brice¹,Werner Matthew³,Chalker Paul R.³^ORCID,Bradley James W.²^ORCID,Kelly Peter J.¹^ORCID

Affiliation:

1. Surface Engineering Group, Manchester Metropolitan University, Manchester M1 5GD, United Kingdom

2. Department of Electrical Engineering and Electronics, University of Liverpool, Brownlow Hill L69 3GJ, United Kingdom

3. Department of Engineering, University of Liverpool, Liverpool L69 3GH, United Kingdom

Funder

Engineering and Physical Sciences Research Council

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000118

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The Role of HiPIMS Pulse Length in Reactive Deposition of Transparent Conductive Oxide Nb:TiO2 Films;Materials Research;2023

2. Crystallization and conductivity of large-domain Nb-doped TiO2 films prepared by electron beam evaporation;Thin Solid Films;2022-07

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