Hydrocarbon film growth by energetic CH3 molecule impact on SiC (001) surface-Reference-Cited by-同舟云学术

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Hydrocarbon film growth by energetic CH3 molecule impact on SiC (001) surface

Published:2007-08 Issue:20 Volume:253 Page:8517-8523
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Gou F.,Chuanliang Meng,Zhouling Z.T.,Qian Qiu

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference29 articles.

1. Combined magnetron sputtering and ECR-CVD deposition of diamond-like carbon films

2. Pulsed PECVD deposition of diamond-like carbon films

3. A hydrocarbon reaction model for low temperature hydrogen plasmas and an application to the Joint European Torus

4. Hydrogen isotope retention and recycling in fusion reactor plasma-facing components

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1. Molecular dynamics simulation of deposition of amorphous carbon films on sapphire surfaces;Diamond and Related Materials;2023-12

2. Molecular dynamics study of interaction between the H atoms and Si surface;Acta Physica Sinica;2013

3. Angular Effects on F+Etching SiC: MD Study;Plasma Science and Technology;2012-12

4. Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals;Applied Surface Science;2012-12

5. Molecular Dynamics Simulations of Atomic H Etching SiC Surface;Physics Procedia;2012

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