Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference101 articles.
1. The Science and Engineering of Microelectronic Fabrication;Campbell,1996
2. ULSI Technology,1996
3. International Technology Roadmap for Semiconductors, Semiconductor Industry Association, 1999
4. See, for example: J.R. Arthur, Molecular beam epitaxy, Surf. Sci. 500 (2002) 189
5. P. Finnie, Y. Homma, Epitaxy: the motion picture, Surf. Sci. 500 (2002) 437
Cited by
535 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献