1. Leibniz Institute of Surface Engineering (IOM) , Permoserstraße 15, 04318 Leipzig , Germany
2. Chemnitz University of Technology, Center for Micro and Nano Technologies (ZfM) , Reichenhainer Str. 70, 09126 Chemnitz , Germany
3. Fraunhofer Institute for Electronic Nano Systems (ENAS) , Technologie – Campus 3, 09126 Chemnitz , Germany
4. Technical University of Applied Sciences Wildau , Hochschulring 1, 15745 Wildau , Germany
5. Chemnitz University of Technology, Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN) , Rosenbergstraße 6, 09126 Chemnitz , Germany
6. Ruhr University Bochum , 44801 Bochum , Germany
7. Leibniz Institute for Solid State and Materials Research (IFW) , 01069 Dresden , Germany
8. Fraunhofer Institute for Microelectronic Circuits and Systems (IMS) , Finkenstr. 61, 47057 Duisburg , Germany