Atomic hydrogen cleaning of polar III–V semiconductor surfaces
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference57 articles.
1. Thermal desorption of InSb surface oxides
2. Preparation of Carbon‐Free GaAs Surfaces: AES and RHEED Analysis
3. Atomic hydrogen cleaning of GaAs and InP surfaces studied by photoemission spectroscopy
4. Low-Temperature Cleaning of GaAs Substrate by Atomic Hydrogen Irradiation
5. Surface Cleaning of Si-Doped/Undoped GaAs Substrates
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