Modelling and experimental study of machined depth in AFM-based milling of nanochannels-Reference-Cited by-同舟云学术

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Modelling and experimental study of machined depth in AFM-based milling of nanochannels

Published:2013-10 Issue: Volume:73 Page:87-96
ISSN:0890-6955
Container-title:International Journal of Machine Tools and Manufacture
language:en
Short-container-title:International Journal of Machine Tools and Manufacture

Author:

Geng Yanquan,Yan Yongda,Xing Yangming,Zhao Xuesen,Hu Zhenjiang

Funder

National Science Foundations of China

Author of National Excellent Doctoral Dissertation of PR China

Open Foundation of State Key Laboratory of Physical Chemistry of Solid Surface, Xiamen University

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference27 articles.

1. Review of fabrication of nanochannels for single phase liquid flow;Perry;Microfluidics and Nanofluidics,2006

2. Nanoengineered device for drug delivery application;Sinha;Nanotechnology,2004

3. Wet anisotropic etching for fluidic 1D nanochannels;Haneveld;Journal of Micromechanics and Microengineering,2003

4. Fabrication of size-controllable nanofluidics channels by nanoimprinting and its application for DNA stretching;Guo;Nano Letters,2004

5. Nanochannel fabrication for chemical sensors;Stern;Journal of Vacuum Science and Technology B,1997

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