Experimental study of surface generation and force modeling in micro-grinding of single crystal silicon considering crystallographic effects

Author:

Cheng J.,Gong Y.D.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference20 articles.

1. Microstructure grooves with a width of less than 50mm cut with ground hard metal micro-end mills;Schaller;Precis. Eng.,1999

2. Recent advances in mechanical micromachining;Dornfeld;Ann. CIRP,2006

3. C.J. Morgan, R.R. Vallance, E.R. Marsh, Specific grinding energy while microgrinding tungsten carbide with polycrystalline diamond micro tools, in: ICOMM-2007 Second International Conference on Micro-Manufacturing, Sep 10 2007,Greenville, South Carolina, USA, No. 39

4. Micro grinding tool for manufacture of complex structures in brittle materials;Aurich;CIRP Ann. Manuf. Technol.,2009

5. Experimental study on mechanism of surface formation for micro-grinding of hard brittle material[J];Cheng;Chin. J. Mech. Eng.,2012

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