Polishing-pad-free electrochemical mechanical polishing of single-crystalline SiC surfaces using polyurethane–CeO2 core–shell particles
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference29 articles.
1. Ultra-precision dicing and wire sawing of silicon carbide (SiC);Cvetkovic;Microelectron. Eng.,2011
2. Comparison of slicing-induced damage in hexagonal SiC by wire sawing with loose abrasive, wire sawing with fixed abrasive, and electric discharge machining;Ishikawa;Jpn. J. Appl. Phys.,2014
3. Surface characterization of 6H-SiC (0001) substrates in indentation and abrasive machining;Yin;Int. J. Mach. Tools Man.,2004
4. Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurries;Yasseen;J. Electrochem. Soc.,1999
5. Deep ultraviolet raman microspectroscopic characterization of polishing-induced surface damage in SiC crystals;Nakashima;J. Electrochem. Soc.,2006
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