Low temperature plasma deposition of silicon thin films: From amorphous to crystalline
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Amorphous silicon: Vehicle and test bed for large-area electronics
2. Substrate selectivity in the formation of microcrystalline silicon: Mechanisms and technological consequences
3. On the growth mechanism of a-Si:H
4. Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphous silicon
5. Synthesis of silicon nanocrystals in silane plasmas for nanoelectronics and large area electronic devices
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