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Study of dependence of electron beam induced surface relief formation on Ge-As-Se thin films on the film elemental composition

  • Published:2017-01 Issue: Volume:456 Page:7-11
  • ISSN:0022-3093
  • Container-title:Journal of Non-Crystalline Solids
  • language:en
  • Short-container-title:Journal of Non-Crystalline Solids

Author:

Kuzma V.,Bilanych V.,Kozejova M.,Hlozna D.,Feher A.,Rizak V.,Komanicky V.

Funder

National Scholarship Programme

Slovak Research and Development Agency

ERDF EU

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Photoinduced effects and metastability in amorphous semiconductors and insulators;Shimakawa;Adv. Phys.,1995

2. Photoinduced processes in chalcogenide glasses;Tanaka;Curr. Opin. Solid State Mater. Sci.,1996

3. Electron beam induced reliefs in chalcogenide glasses;Tanaka;J. Appl. Phys.,1997

4. Nanostructuring of chalcogenide glasses using electron beam lithography;Vlcek;J. Optoelectron. Adv. Mater.,2006

5. Comparative study of electron- and photo-induced structural transformations on the surface of As35S65 amorphous thin films;Kovalskiy;Thin Solid Films,2008

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1. Nano-Structuring Chalcogenide Semiconductor Thin Films with Electron Beam;2023 IEEE 13th International Conference Nanomaterials: Applications & Properties (NAP);2023-09-10

2. Charge Relaxation in Chalcogenide Films under Electron Beam Irradiation;Journal of Non-Crystalline Solids;2023-08

3. Utilization of As50Se50 thin films in electron beam lithography;Materials Chemistry and Physics;2021-02

4. Investigation of structural changes in AsxSe100-x amorphous thin films after electron beam irradiation with XAFS, XANES and Kelvin force microscopy;Applied Surface Science;2020-11

5. Electron-beam recording of surface structures on As-S-Se chalcogenide thin films;Фізика і хімія твердого тіла;2020-03-29
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