Author:
Palka K.,Kurka M.,Slang S.,Vlcek M.
Funder
European Regional Development Fund
Ministerstvo Školství, Mládeže a Tělovýchovy
Subject
Condensed Matter Physics,General Materials Science
Reference32 articles.
1. Amorphous Chalcogenide Semiconductors and Related Materials;Tanaka,2011
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3. Mir. Vlcek, Chalcogenide Glasses - Chalcogenide Glass Resists for Lithography;Jain,2014
4. Glasses for lithography
5. Chalcogenide glassy photoresists: History of development, properties, and applications
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