Comparative study of optical properties of germanium carbon films deposited by reactive sputtering and co-sputtering-Reference-Cited by-同舟云学术

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Comparative study of optical properties of germanium carbon films deposited by reactive sputtering and co-sputtering

Published:2013-03 Issue: Volume:363 Page:46-49
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Che Xing-Sen,Liu Zheng-Tang,Li Yang-Ping,Wang Ning

Funder

Research Fund of the State Key Laboratory of Solidification Processing

111 project

National Natural Science Foundation of China

Northwestern Polytechnical University (NPU) Foundation for Fundamental Research

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Fabrication of a‐SiGe structure by rf sputtering for solar cell purposes

2. Si-rich a-SiC:H thin films: Structural and optical transformations during thermal annealing

3. Fabrication of amorphous silicon carbide films using VHF-PECVD for triple-junction thin-film solar cell applications

4. A comparison of the optical, IR, electron spin resonance and conductivity properties of a-Ge1−xCx:H with a-Ge:H and a-Ge thin films prepared by r.f. sputtering

5. Amorphous hydrogenated carbon germanium films for hard multilayer IR optical coatings

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of Si atoms on the structure and electronic properties of amorphous DLC films;Journal of Non-Crystalline Solids;2023-01

2. First-principles molecular dynamics study on structural and electronic properties of amorphous germanium carbide;Journal of Non-Crystalline Solids;2016-07

3. Effect of substrate temperature and radio frequency power on compositional, structural and optical properties of amorphous germanium carbide films deposited using sputtering;Journal of Non-Crystalline Solids;2016-07

4. Synthesis of nano-crystalline germanium carbide using radio frequency magnetron sputtering;Thin Solid Films;2015-10

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