Properties of amorphous ZrOx thin films deposited by filtered cathodic vacuum arc-Reference-Cited by-同舟云学术

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Properties of amorphous ZrOx thin films deposited by filtered cathodic vacuum arc

Published:2003-12 Issue:1-3 Volume:332 Page:185-189
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Chua Daniel H.C.,Milne W.I.,Zhao Z.W.,Tay B.K.,Lau S.P.,Carney T.,White R.G.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Preparation and Properties of Pyrolytic Zirconium Dioxide Films

2. Structural and optical properties of zirconia thin films

3. Thin SOFC electrolytes and their interfacesâ A near-term research strategy

4. International Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, CA, 1999

5. Hafnium and zirconium silicates for advanced gate dielectrics

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