Post thermal annealing crystallization and reactive ion etching of SiC films produced by PECVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Development of Si–SiC Hybrid Structures for Elevated Temperature Micro-Turbomachinery
2. An Overview of SiC Growth
3. Growth and characterization of 4H–SiC in vertical hot-wall chemical vapor deposition
4. Comparative Study of Heteroepitaxially and Homoepitaxially Grown 3C-SiC Films
5. PECVD silicon carbide as a chemically resistant material for micromachined transducers
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