Controlling the quality of nanocrystalline silicon made by hot-wire chemical vapor deposition by using a reverse H2 profiling technique

Author:

Li H.,Franken R.H.,Stolk R.L.,van der Werf C.H.M.,Rath J.K.,Schropp R.E.I.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Complete microcrystallinep‐i‐nsolar cell—Crystalline or amorphous cell behavior?

2. T. Repmann, B. Sehrbrock, C. Zahren, H. Siekmann, J. Müller, B. Rech, W. Psyk, R. Geyer, P. Lechner, in: Proceedings of 3rd World Conference on Photovoltaic Energy Conversion, Osaka, May 2003, 5O.A6.03.

3. M. Yoshimi, T. Sasaki, T. Sawada, T. Suezaki, T. Meguro, T. Matsuda, K. Santo, K. Wadano, M. Ichikawa, A. Nakajima, K. Yamamoto, in: Proceedings of 3rd World Conference on Photovoltaic Energy Conversion, Osaka, May 2003, 5O.A6.01.

4. Present status of micro- and polycrystalline silicon solar cells made by hot-wire chemical vapor deposition

5. H. Li, Single and multijunction silicon based thin film solar cells on flexible substrates with absorber layers made by hot-wire CVD, PhD thesis, Utrecht University, 2007.

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