Effects of hydrogen content in sputtering ambient on ZnO:Al electrical properties-Reference-Cited by-同舟云学术

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Effects of hydrogen content in sputtering ambient on ZnO:Al electrical properties

Published:2008-05 Issue:19-25 Volume:354 Page:2787-2790
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Duenow Joel N.,Gessert Timothy A.,Wood David M.,Young David L.,Coutts Timothy J.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Applications and Processing of Transparent Conducting Oxides

2. Characterization of Transparent Conducting Oxides

3. Transparent conducting oxide semiconductors for transparent electrodes

4. Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering

5. Resistivity of polycrystalline zinc oxide films: current status and physical limit

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical and electrical properties of H2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles;Materials Science in Semiconductor Processing;2018-09

2. Influence of low sputtering pressure on structural, electrical and optical properties of Al-doped zinc oxide thin films;Physica B: Condensed Matter;2016-08

3. High-Hall-Mobility Al-Doped ZnO Films Having Textured Polycrystalline Structure with a Well-Defined (0001) Orientation;Nanoscale Research Letters;2016-06-30

4. Effect of hydrogen doping on the properties of Al and F co-doped ZnO films for thin film silicon solar cell applications;Thin Solid Films;2016-04

5. Zero added oxygen for high quality sputtered ITO: A data science investigation of reduced Sn-content and added Zr;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2016-03

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