Comparison of three un-cooled micro-bolometers configurations based on amorphous silicon–germanium thin films deposited by plasma-Reference-Cited by-同舟云学术

Comparison of three un-cooled micro-bolometers configurations based on amorphous silicon–germanium thin films deposited by plasma

Published:2008-05 Issue:19-25 Volume:354 Page:2598-2602
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Moreno M.,Kosarev A.,Torres A.,Ambrosio R.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Eric Mottin, Astrid Bain, Jean-Luc Martin, Jean-Louis Ouvrier-Buffet, Sylvette Bisotto, Jean-Jacques Yon, Jean-Luc Tissot, in: XXVIII SPIE Proc., vol. 4820, 2003, p. 200.

2. Amorphous Silicon Microbolometer Technology

3. J.J. Yon, A. Astier, S. Bisotto, G. Chamingis, A. Durand, J.L. Martin, E. Mottin, J.L. Ouvrier-Buffet, J.L. Tissot, in: XXXI SPIE Proc., vol. 5783, 2005, p. 432.

4. Low frequency plasma deposition and characterization of Si1−xGex:H,F films

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