High energy focused ion beam lithography using P-beam writing-Reference-Cited by-同舟云学术

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High energy focused ion beam lithography using P-beam writing

Published:2005-12 Issue:1-4 Volume:241 Page:397-401
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Glass Gary A.,Rout Bibhudutta,Dymnikov Alexander D.,Greco Richard R.,Kamal Mithun,Reinhardt James R.,Peeples John A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference8 articles.

1. Handbook of Modern Ion Beam Materials Analysis,1995

2. Materials Analysis Using a Nuclear Microprobe;Breese,1996

3. Focused high energy proton beam micromachining: A perspective view

4. Three-dimensional nanolithography using proton beam writing

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3. Heavy ion beam micromachining on LiNbO3;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-01

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