Recent advances in R&D of gas cluster ion beam processes and equipment-Reference-Cited by-同舟云学术

Recent advances in R&D of gas cluster ion beam processes and equipment

Published:2005-12 Issue:1-4 Volume:241 Page:589-593
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Yamada Isao,Toyoda Noriaki

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference11 articles.

1. Proceedings 14th Symposium on Ion Sources and Ion-Assisted Technology, Tokyo;Yamada,1991

2. Investigation of ionized cluster beam bombardment and its applications for materials modification

3. Materials processing by gas cluster ion beams

4. K. Owaki, S. Nakagawa, N. Toyoda, I. Yamada, in: 4th Workshop on Cluster Ion Beam and Advanced Quantum Beam Process Technology, Osaka Science & Technology Center, Osaka, 2003, p. 129.

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