Optical properties of InxGa1−xP/InP grown at high fluence Ga+ implantation on InP using focused ion beam
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference18 articles.
1. 188 GHz doped-channel In0.8Ga0.2P/In0.53Ga0.47As/InP HFETs
2. InGaP/InP waveguides
3. (Ga,In)P: A standard alloy in the classification of phonon mode behavior
4. Formation of High Resistance Region in GaAs by Ga Focused-Ion-Beam Implantation
5. Lateral GaAs Photodetector Fabricated by Ga Focused-Jon-Beam Implantation
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Low-temperature damage formation in ion-implanted SiC and its correlation with primary energy deposition;Vacuum;2014-07
2. Low-temperature damage formation in ion implanted InP;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07
3. Effect of In implantation and annealing on the lattice disorder and nano-mechanical properties of GaN;Thin Solid Films;2013-03
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