Xe distribution in amorphous SiO 2 as a function of implantation and thermal annealing parameters
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference20 articles.
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4. Ion implantation- and radiation-induced structural modifications in amorphous SiO2;Devine;J. Non-Cryst. Solids,1993
5. Preparation and characterization of porous silica xerogel film for low dielectric application
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