Simultaneous quantification of light elements in thin films deposited on Si substrates using proton EBS (Elastic Backscattering Spectroscopy)-Reference-Cited by-同舟云学术

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Simultaneous quantification of light elements in thin films deposited on Si substrates using proton EBS (Elastic Backscattering Spectroscopy)

Published:2014-08 Issue: Volume:332 Page:449-453
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Ferrer F.J.,Alcaire M.,Caballero-Hernández J.,Garcia-Garcia F.J.,Gil-Rostra J.,Terriza A.,Godinho V.,García-López J.,Barranco A.,Fernández-Camacho A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference39 articles.

1. Front Matter, in Functional Polymer Films: 2 Volume Set,2011

2. Deuterium bonding at internal surfaces in silicon

3. Relative free energies of Si surfaces

4. Antibacterial activity of fluorine incorporated DLC films

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