A new apparatus for deep patterning of beam sensitive targets by means of high-energy ion beam
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference24 articles.
1. A review of focused ion beam applications in microsystem technology
2. Fabrication of nanoscale heterostructure devices with a focused ion beam microscope
3. High resolution electron microscopy of tracks in solids
4. Ion irradiation of epitaxialYBa2Cu3O7−δfilms: Effects of electronic energy loss
5. Vortex confinement by columnar defects inYBa2Cu3O7crystals: Enhanced pinning at high fields and temperatures
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4. Heavy-Ion Patterned Micro-Channels in YBCO Microwave Resonators;IEEE Transactions on Applied Superconductivity;2013-06
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