A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

Author:

Barradas N.P.,Added N.,Arnoldbik W.M.,Bogdanović-Radović I.,Bohne W.,Cardoso S.,Danner C.,Dytlewski N.,Freitas P.P.,Jakšić M.,Jeynes C.,Krug C.,Lennard W.N.,Lindner S.,Linsmeier Ch.,Medunić Z.,Pelicon P.,Pezzi R.P.,Radtke C.,Röhrich J.,Sajavaara T.,Salgado T.D.M.,Stedile F.C.,Tabacniks M.H.,Vickridge I.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference61 articles.

1. The use of ion beam techniques for analysis of light elements in thin films, including depth profiling – Report of the First Research Co-ordination Meeting, IAEA, Vienna, Austria, 12–15 December 2000, Limited distribution report F1-RC-831

2. IAEA Technical Committee Meeting F1-TC-2000.2 on Comparison of Nuclear Analytical Methods with Competitive Methods for Materials Characterisation, IAEA, Vienna, Austria, 9–13 October 2000, Proc. (IAEA-TECDOC), in press

3. Profiling hydrogen in materials using ion beams

4. Intercomparison of absolute standards for RBS studies

5. An intercomparison of absolute measurements of the oxygen and tantalum thickness of tantalum pentoxide reference materials, BCR 261, by six laboratories

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